Description Focused or Uniform Wide-Angle Low-Energy Electron Beams 10 eV to 1500 eV Applications: Surface Physics Studies Vacuum Physics Experiments Charge Neutralization Electron Desorption Surface Scrubbing Phosphor Testing Ionization Experiments Semiconductor Processing Features / Options: Widely Controllable Parameters Flood Beams or Narrow Angle Beams Electrostatic Focusing Deflection, Rastering, Pulsing Demountable Gun Computer / Remote Control Energy Range: 10 eV to 1500 eV Beam Current / Spot Size: 1 nA to 100 µA Spot Size: 1mm to 100mm Mounting: 2.75″ (2¾”) CF, demountable option Features/Options: Narrow-Angle Beam or Flood Beam, Electrostatic Focusing, Deflection, Rastering, Pulsing The Kimball Physics EFG-7 Electron Gun, with its matching EGPS-1017 Power Supply, is intended for use in a variety of ultra-high vacuum (UHV) physics experiments, surface physics experiments, and processing applications. It is a complete subsystem ready to attach and turn on. Beam energy, beam current and spot size are independently adjustable over wide ranges. The EFG-7 Electron Gun uses a refractory metal cathode to generate a uniform flood beam. The gun design allows for generation of the beam down to low energies, and very low currents. The standard model EFG-7 produces a beam current of 1 nA to 100 μA and energies of 10 eV to 1500 eV. A High Current option provides beam currents up to 1 mA. Centering, deflection, rastering and pulsing are all available as options. Because the design has been optimized as a flood gun and uses a cylindrical 4-pole deflector, deflection aberrations can be severe when the beam is focused into a small spot. UHV technology is used throughout. The gun can be run in vacuums from 10-11 torr up to 10-5 torr for the standard Ta disc cathode. The electron gun is bakeable to 350°C with cables removed. With Faraday cup, maximum is 65oC unless removed. efg-7-egps-1017 To download this PDF and other associated documents, Please visit Resources Tab above.
